This book is mainly intended to be a textbook for upper undergraduate/ graduate level students. The numerous solved examples together with the proposed problems are hoped to be useful for both the student and the instructor. These applications supplement the material which is offered in this book, and which attempts to be self-contained such that reference to other sources be not an absolute pre-requisite. It is also hoped that the book will be of interest to a larger segment of readers involved with MEMS development at different levels of background and proficiency/skills. The researcher with a non-mechanical background should find topics in this book that could enrich her/his customary modeling/design arsenal, while the professional of mechanical formation would hopefully encounter familiar principles that are applied to microsystem modeling and design. This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy.
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