Fabrication of GaAs Devices

The introduction to GaAs devices semiconductor properties, growth, characterization and processing techniques. Cleaning and passivation of GaAs and related alloys. Wet etching and photo lithography of GaAs and Related Alloys. Dry Etching of GaAs and Related Alloys Ohmic Contacts. Schottky Contacts. Field Effect Transistors. Special Fabrication Issues for Opto-Electronic and MIS GaAs Devices. This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors).



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